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Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE Tutorial Text Vol. TT12) (Tutorial Texts in Optical Engineering)

Ludwig Reimer




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 | #474841 in Books |  SPIE Press |  1993-02-01 | Original language:English | PDF # 1 |  10.00 x7.00 x.50l,.65 | File type: PDF | 117 pages

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While most textbooks about scanning electron microscopy (SEM) cover the high-voltage range from 5-50 keV, this volume considers the special problems in low-voltage SEM and summarizes the differences between LVSEM and conventional SEM. Chapters cover the influence of lens aberrations and design on electron-probe formation; the effect of elastic and inelastic scattering processes on electron diffusion and electron range; charging and radiation damage effects; the dependenc...

You easily download any file type for your gadget.Image Formation in Low-Voltage Scanning Electron Microscopy (SPIE Tutorial Text Vol. TT12) (Tutorial Texts in Optical Engineering)   |  Ludwig Reimer. I was recommended this book by a dear friend of mine.

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